Hot Plate Station
The hot plate station is comprised of four Prazitherm precision hot plates manufactured for resist processing. Each hot plate is sized 350mm x 350mm. They are flat and level, with temperature uniformity of +/- 0.5潞. The maximum operating temperature is limited to 200潞C in order to maintain temperature inside the cleanroom. A hood located over the hot plate station ensures evaporated fumes are not released into the cleanroom environment.
Each hot plate is controlled through its own PID controller with a PC using iTools漏 software by Eurotherm. The programmable software allows for controlled and automated heating and cooling cycles, though there is no active cooling associated with the hot plates. Each controller has 4 recipes, with 16 segments available for programming each recipe.