MicroWriter ML3 Pro
The MicroWriter ML3 Pro is a direct-write photolithography machine for rapid prototyping.
The ML3 Pro can write features down to 400nm into photoresists over a 195mm x 195mm x 15mm area.
Key Features:
- 195mm x 195mm maximum writing area
- 230mm x 230mm x15mm maximum wafer size
- 0.4碌m, 0.6碌m, 1碌m, 2碌m and 5碌m minimum sizes across full writing area
- 365nm light source
- XY interferometer with 1nm resolution for precise motion control
- Writing speeds - up to: 17mm虏/minute (0.6碌m minimum feature size), 50mm虏/minute ( 1碌m minimum feature size),120mm虏/minute (2碌m minimum feature size) and 180mm虏/minute ( 5碌m minimum feature size)
- Auto focus system using yellow light with real-time surface tracking laser - no minimum wafer size